| Leader | | | 00226naa##2200133uu#4500 |
| 001 | | | j00001306 |
| 003 | | | PNU |
| 005 | | | 20090128100254 |
| 008 | | | 100514s th 000 0 tha d |
| 099 | | | \aบทความ |
| 100 | | | \aN. Somwang. |
| 245 | 0 | 0 | \aCharactezation of aluminum oxynitride thin films grown by reactive RF magnetron sputtering / \cN. Somwang (และคณะ). |
| 773 | | | \tThai Journal of Physics.\gSeries 4. |
| 999 | | | \akolsmat |